Microfrabrication and testing techniques

Important: From June 6th, all students enrolled in this course will be placed on the waiting list.

Goals

Provide a general insight to deposition techniques related with microdevices fabrication, as well as pre-deposition strategies (surface preparation, buffer materials) and post-deposition alternatives (to modify and/or improve some aspects).
Offer a full perspective about testing techniques regarding functionality.
Ensure a deep comprehension about clean-room features (deposition techniques, substrate quality, materials impurity content) and their impact on devices’ performance.

Minimum Content

Introduction to Clean room environment
Substrate preparation: Introduction, substrates types and cleanning
Chapters of Fransilla: 1, 4, 12 and 13
Lythography
Chapters of Fransilla: 8, 9 and 10
Deposition techniques
Chapters of Fransilla: 5, 6 and 7 and sputtering in detail
Electrical characterization
Chapter of Schroder: 1 and general remarks of experimental setup to be used
Etching techniques
Chapters of Fransilla: 4, 20 and 21
Structural characterizaction
Chapter of Fransilla: 2, Chapter of Ohring: 2
LOCOS process

Important

This course is limited to 10 students.
The priority is the doctoral students. However, the other applicants will not be dismissed.
Laboratories will be held at CMNB-INTI, just 1km from Campus Miguelete. Theoretical classes will be taught at UNSAM.

Teaching Team

Dr. Ing. Federico Golmar (UNSAM-INTI-CONICET) holds a degree in Electronics Engineering from the Faculty of Engineering of the U.B.A. 2003. He gets his PhD. of the University of Buenos Aires in the Engineering Area. He was a professor at the Faculty of Engineering of the University of Buenos Aires and, since 2013, is a professor at the School of Science and Technology of the University of San Martín, dictating various doctoral courses. He directed 6 PhD or Master thesis. He has published more than 30 articles in scientific journals with reference, and numerous articles in congresses. His area of ​​research is the study of nanodevices and Nanofrabrication. He is an Associate Researcher at CONICET.

Since 2014, he direct the MeMOSat and LabOSat projects, developing ReRAM devices for space applications and the platforms for testing this technology in nano-satellites. In 2016, he was awarded with an INNOVAR prize in the category New Technologies in Scientific Research for the development of a Low-cost platform to perform experiments in Low Earth Orbits.

Federico Golmar is the General Chair of this EAMTA 2017.

Dra. Cynthia Quinteros (CAB.CNEA-CONICET) is a postdoctoral CONICET fellow at National Council of Atomic Energy (Bariloche-Argentina). She got a PhD (2016) and a degree in Physics (2011), both at Buenos Aires University on the topic of micro and nanoelectronics. Dr. Quinteros’ research interests are in the areas of clean-room processes, microfabrication techniques, multifunctional devices, memory storage, and radiation hardness. She performed scientific stays at ST (Catania-Italy), FZJ (Juelich-Germany) and INL (Braga-Portugal). She is also very interested in education, currently involved in informal teaching projects. She occupied a Physics professor position at National University of Río Negro (Bariloche-Argentina) and had worked as teaching assistant since 2008.


Lic. Mariano Barella (UNSAM-CONICET) is PhD student working in the field of resistive switching. He has a degree in Physics (2013) from University of Buenos Aires (UBA). Currently, his research is focus on micro and nanofabrication techniques and its impact on resistive switching devices. Mariano is a fellow of CONICET (argentinian council of science) and Sábato Institute of the National University of San Martín and National Atomic Energy Commission.

His research interests are non-volatile memory devices such as ReRAM and memristors, electrical transport in condensed matter (experimental approach), introduction of controlled defects in oxides and their effects on transport, and device physics and oxide electronics.

On 2015, he performed stays at the Iberian Nanotechnology Lab (INL, Braga – Portugal) and, since 2014, he actively participates in the MeMOSat project developing ReRAM devices for space applications (LabOSat). In 2016, he was awarded an INNOVAR prize in the category New Technologies in Scientific Research for the development of a Low-cost platform to perform experiments in Low Earth Orbits. Since 2011 is lecturer of the physics department of the Faculty of Natural and Exact Sciences at UBA.

Mariano Barella is part of the Local Organizing Committee of EAMTA 2017.

Recommended bibliography

1. S. Fransilla, “Introduction to Microfabrication”, Wiley, 2004
2. D. K. Schroder, “Semiconductor Material and Device Characterization”, 3ed, Wiley, 2006
3. M. Ohring, “Material science of thin films”, 2ed, Elsevier, 2001

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